Discussion Closed This discussion was created more than 6 months ago and has been closed. To start a new discussion with a link back to this one, click here.

Can COMSOL simulate growth of materials in PECVD on a rotating wafer?

Please login with a confirmed email address before reporting spam

Hello,
I am new to COMSOL. Currently I am learning the RF module for a part of my project. Another part of the project involves thin film growth in PECVD (Plasma Enhanced Chemical Vapor Deposition). COMSOL seems to be a powerful tool. Hence I want to see to what extent it can be useful for my projects. Can I simulate depositing thin films on rotating wafers in the PECVD chamber? Or is this too much to ask for?
Thanks

0 Replies Last Post 25 feb 2016, 15:53 GMT-5
COMSOL Moderator

Hello Zeba Naqvi

Your Discussion has gone 30 days without a reply. If you still need help with COMSOL and have an on-subscription license, please visit our Support Center for help.

If you do not hold an on-subscription license, you may find an answer in another Discussion or in the Knowledge Base.

Note that while COMSOL employees may participate in the discussion forum, COMSOL® software users who are on-subscription should submit their questions via the Support Center for a more comprehensive response from the Technical Support team.