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MEMS Module, Electrostatics
Posted 29 giu 2016, 10:08 GMT-4 0 Replies
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Subdomain Settings – Electrostatics
1- Go to the Multiphysics menu and make sure that Electrostatics (emes) is selected.
2- Open the Physics>Subdomain Settings dialog box.
3- Select Subdomain 2 and entre 9.7 for relative permittivity of nitride, εr.
4- Select Subdomain 4 and entre 4.5 for relative permittivity of poly-silicon, εr.
5- Click the Force tab. In the first row enter Fes. The software automatically generates the
variables Fes_nTx_emes and Fes_nTy_emes for the electrostatic force components. Later
on you use these variables to define the boundary load in the Plane Strain application
mode.
6- Click OK.
On Comsol that I have I cannot find the Force tab. I am new Comsol user, so any suggestions please?
thank you
Hello Khaled Younes
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