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How to combine the Semiconductor module with the MEMS piezoelectric module in COMSOL?
Posted 8 gen 2023, 11:53 GMT-5 Semiconductor Devices, MEMS & Piezoelectric Devices, Physics Interfaces Version 6.1 1 Reply
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I am trying to run a simulation in which I need 2 modules together: the MEMS Module which deals with the piezoelectric effect by coupling both the Solid Mechanics (solid) and Electrostatics (es) interfaces, and the Semiconductor Module. So far both modules are working independently, and I could not find a suitable method to integrate them together. My research is regarding the doping effect on piezoelectric potential output and properties. So I need the equations of both modules to be able to cross-communicate to cover all theoretical aspects of this simulation. I tried to change the equations of the semiconductor module but was not successful. So my question is, what are all the steps needed so that I can change the COMSOL setup to combine both modules (MEMS and Semiconductor) for them to cross-communicate and simulate successfully?
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I looked for the MEMS module and the semiconductor module, but I couldn't find an example of modeling by coupling the two modules together. I couldn't find an example of combining the two modules, but it seems possible. However, it seems necessary to study which calculation result values are exchanged with each other in each module, or which variables or factors are affected by the calculation result values.