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Double beam resonator with electrostatic interaction
Posted 4 gen 2013, 08:03 GMT-5 MEMS & Nanotechnology, MEMS & Piezoelectric Devices Version 4.1 0 Replies
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I'm modeling a structure comprised of two beams (clamped-free), which are facing each other and are totally symmetrical (see image).
The beams are made of a stack of several thin films. There is a piezoelectric layer and an electrode. Both electrode cross-sections are interacting electrostatically. Thus there are vibration modes where both beams oscillate in a harmonic manner.
I am using the piezoelectric interface (pzd). For the non-piezoelectric layers I use the Linear Elastic Material Model.
My problem is, I am unable to get synchronous oscillations when performing eigenfrequency analysis. Instead I am getting eigenfrequencies where only one beam is oscillationg alone. How can I tell Comsol that the electrode cross-sections are in electrostatic interaction and there is coupling?
Any suggestions are welcome.
Thank you!
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Hello Don Domat
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