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MEMS Gyroscope Heater
Posted 25 ago 2024, 18:46 GMT-4 Semiconductor Devices, Fluid & Heat, Heat Transfer Version 6.2 0 Replies
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Hello,
I was wondering if it is possible to combine a microheater simulation with a mems gyroscope simulation. I have two separate MPH files with different simulations. Would I just recreate the heater geometry in my MEMS gyro simulation and create two boundaries? How can I use the subsequent resultant heat from the heater to be applied to the MEMS gyro? Would it make more sense to take that resultant heat value and apply a thermal boundary on the MEMS itself?
Hello theo_v
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