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Filtra

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effeft of width on cantilever

Posted 22 mag 2014, 03:57 GMT-4 MEMS & Nanotechnology, MEMS & Piezoelectric Devices Version 4.3b 1 Reply

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If the change in width of the cantilever then pul l in voltage increses or decreses
1 Reply Last Post 26 mag 2014, 04:18 GMT-4
Pieter Westerik
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Posted: 1 decade ago 26 mag 2014, 04:18 GMT-4
That depends. Do you include the region next to the cantilever? This region does contribute to the bending force (fringing field effect) but not to the restoring force (stiffness of the cantilever). If you make the cantilever wider the restoring and bending force in the cantilever region grow equally fast, but the fringing field force remains the same, so the ratio restoring:bending force becomes larger, so your pull-in voltage should increase.
That depends. Do you include the region next to the cantilever? This region does contribute to the bending force (fringing field effect) but not to the restoring force (stiffness of the cantilever). If you make the cantilever wider the restoring and bending force in the cantilever region grow equally fast, but the fringing field force remains the same, so the ratio restoring:bending force becomes larger, so your pull-in voltage should increase.

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