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Statistical Modeling and Contact Analysis of RF MEMS Surface

J. Liu [1], V. B. Chalivendra [1], C. Goldsmith [2], W. Huang [1],
[1] Department of Mechanical Engineering, University of Massachusetts - Dartmouth, Dartmouth, MA, USA
[2] MEMtronics Corporation, Richardson, TX, USA
Published in 2015

Radio frequency (RF) micro-electro mechanical system(MEMS) switch works in on/off modes controlled by electrostatic forces. In off mode, rough surfaces of electrodes come into a contact to shunt the RF signal. Surface contact area has been recognized as a key factor in RF MEMS performance and reliability. Multi scale regular-fractal structure is observed on MEMS surface. Nonlinear Structural Materials Module is implemented for elasto-plastic contact analysis on 3D RF MEMS surface using COMSOL Multiphyiscs® software. Only part of MEMS surface are modeled due to isotropy and homogeneity characteristics of the fractal surface. Contact area and structure deformation are calculated as a function of applied loading . Contact mechanics under cyclic loading/unloading will be investigated in the future.

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