Arizona Thin Film Research

With more than 20 years of combining hands-on and simulation experience in thin-film deposition systems, sources, and processes, Arizona Thin Film Research can assist with designing new systems for complex process criteria, optimizing existing equipment, and more. The Arizona Thin Film Research team uses the COMSOL Multiphysics^® software, combined with real-world process and equipment experience, to model plasma uniformity, deposition uniformity, and substrate heating rates for both static and moving substrates.

A charged particle simulation of a DC planar magnetron with a particle accumulator on the target surface.

Areas of Expertise

Arizona Thin Film Research offers cutting-edge simulation and real-world expertise for tailored thin-film solutions, including magnetron sputtering, ion beam etch, and more. Explore all of their areas of expertise in the list below.

• Large area magnetron sputtering processes

  • DC magnetic modeling and optimization of a magnetron racetrack

  • Electric field modeling to determine the electrical interaction between a magnetron and the surrounding process zone

  • Charged particle tracing for plasma density modeling and target erosion

  • Molecular flow modeling for uniformity analysis

• Ion beam etch processes

• Evaporation processes

• Electron beam sources

• Plasma-enhanced chemical vapor deposition (PECVD) source

• Vacuum system pumping and conductance

• Molecular flow modeling with static and dynamic surfaces

• Thermal and heat transfer modeling

• Static mechanical stress modeling

Contact us today to discuss how COMSOL^® can help solve your thin-film challenges.