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secondary particle is different from primary particle
Posted 9 ago 2016, 10:52 GMT-4 Low-Frequency Electromagnetics, Charged Particle Tracing Version 5.2 2 Replies
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Hi, All,
I am doing 2D charged particle tracing using COMSOL. I have electron bombarding some surface, and generate some positive ion at the surface which would accelerate and travel in the same electrical field. I wonder if there is a node that I could set the secondary particle (ion here) properties (mass/charge) .
regards,
tao
I am doing 2D charged particle tracing using COMSOL. I have electron bombarding some surface, and generate some positive ion at the surface which would accelerate and travel in the same electrical field. I wonder if there is a node that I could set the secondary particle (ion here) properties (mass/charge) .
regards,
tao
2 Replies Last Post 10 ago 2016, 12:40 GMT-4
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Posted:
8 years ago
Hi Tao, you need to add an "Override Properties" feature from the Charged Particle Tracing interface, and set the ion properties there. Then, in your "Secondary Emission" feature, in the "Inherit Properties" section, set the "Inherit properties" combobox to "Override Properties 1.
The above instructions mean that the secondary particles will inherit the mass and charge from the "Override Properties 1" feature instead of "Particle Properties 1".
Dan
The above instructions mean that the secondary particles will inherit the mass and charge from the "Override Properties 1" feature instead of "Particle Properties 1".
Dan
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Posted:
8 years ago
Dan,
got it. thanks.
just push it a little further, when I google "COMSOL" and "sputtering", this article "Studying Target Erosion in Planar Sputtering Magnetrons Using a Discrete Model for Energetic Electrons" showed up. it is published on COMSOL 2013 conference in Rotterdam. but I can not locate it in COMSOL application gallery. I wonder if there is any example model showing ion sputtering effect. from what I read online, it seems little challenging for COMSOL to simulate ion sputtering.
regards,
Tao
got it. thanks.
just push it a little further, when I google "COMSOL" and "sputtering", this article "Studying Target Erosion in Planar Sputtering Magnetrons Using a Discrete Model for Energetic Electrons" showed up. it is published on COMSOL 2013 conference in Rotterdam. but I can not locate it in COMSOL application gallery. I wonder if there is any example model showing ion sputtering effect. from what I read online, it seems little challenging for COMSOL to simulate ion sputtering.
regards,
Tao