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singularity error from plasma simulation

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Hi there,

I'm doing a plasma-polymer surface simulation. I used a fluid dynamic model, with mass transportation model to analyse the concentration of Atomic oxygen in the environment. However, during the simulation, I always encounter singularity error(I used time dependent direct solver). Although this problem can be avoided by using extra coarse mesh, the result doesn't provide enough resolution of atomic oxygen near the bottom wall (if anyone look at the result in the file, he will find a concentration gap near the bottom wall, which is the polymer sample. This is not very physical, and I think this is caused by large mesh size). But if I refine the mesh, singularity errors will pop out. Can anyone help me solve this problem? Thanks in advance.

Attachment is my geometry: upper geometry is plasma source, no kinetics has been build in there. Lower geometry is effluent or the chamber, with bottom wall be my sample surface. (certain loss rate has been set near the bottom wall)

Sincerely,
Haotian


0 Replies Last Post 16 set 2016, 15:11 GMT-4
COMSOL Moderator

Hello Haotian Wang

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