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How to simulate Squeeze Film Damping

Posted 16 apr 2011, 14:52 GMT-4 Version 4.0a 2 Replies

Alec Yovanovitch
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Hello,

I would like to use COMSOL to simulate the effects of squeeze film damping on an oscillating microcantilever in a closed body of fluid. Since the body is closed, the fluid displaced by the microcantilever as it moves down pushes on the top of the cantilever. Any ideas as to how I should go about this? What models to learn from, and what modules / settings I should use?

Thanks,
Alec
2 Replies Last Post 21 nov 2016, 07:23 GMT-5
Ivar KJELBERG COMSOL Multiphysics(r) fan, retired, former "Senior Expert" at CSEM SA (CH)
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Posted: 1 decade ago 16 apr 2011, 15:26 GMT-4
Hi

you have an example model in the MEMS case of the Model library. It treats the squeezed film damping of a mems accelerometer plate. Take a look, its in 3.5 and at least in 4.1 so probably in 4.0 too. Anyhow I can only suggest that you find out how to upgrade to latest version, its far easier to use

--
Good luck
Ivar
Hi you have an example model in the MEMS case of the Model library. It treats the squeezed film damping of a mems accelerometer plate. Take a look, its in 3.5 and at least in 4.1 so probably in 4.0 too. Anyhow I can only suggest that you find out how to upgrade to latest version, its far easier to use -- Good luck Ivar
Anand Upadhyay
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Posted: 8 years ago 21 nov 2016, 07:23 GMT-5

Hello Ivar,

As suggested we don't get model in model library for accelerator in version 5.0
Please tell some steps for squeeze film air damping in MEMS PZR Accelerometer.

regards,
anand
Hello Ivar, As suggested we don't get model in model library for accelerator in version 5.0 Please tell some steps for squeeze film air damping in MEMS PZR Accelerometer. regards, anand

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