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Triangular fixed-fixed nano-beam
Posted 27 gen 2021, 08:56 GMT-5 Structural & Acoustics, Acoustics & Vibrations, MEMS & Piezoelectric Devices Version 5.6 1 Reply
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Hi all,
I am trying to evaluate the quality factor of the vibration of a nano-beam. The beam is etched in a diamond substrate so I model it as large pads on the sides of the beam (see attached image). When I use this model, even the eigenfrequencies cannot be simulated and the results are absured.
If I just use fixed-fixed boundary conditions the eigenfrequencis and mode shapes make sense but the quality factor is infinitly large because there are no support losses.
Would like to hear your suggestions how to evaluate the quality factor taking into account the support losses.
Cheers, Itamar
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