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Baw Resonator Problem
Posted 19 apr 2012, 08:03 GMT-4 MEMS & Nanotechnology, Acoustics & Vibrations, MEMS & Piezoelectric Devices Version 4.2, Version 4.3a 3 Replies
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Hi
I am working on a baw resonator. For our simulation we have considered a 3.5a COMSOL 2D model of Thin Film Bulk Acoustic Wave Resonator in the model archives of COMSOL.
So we treid to simulate the 3d model in 4.2 but so far we are not able to achieve any displacement and correct results.We were struggling with the meshing earlier but we adopted swept mesh with tri and tetra for our model.
Our Model consist of 4 thin layers of diferent materials and we want to obtain freq. response on the aplication of the voltage.
Please inform us about the ambiguities and errors in our model so that we can conclude our research.
Thank You
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Vineet Bansal
Project Associate, NPMASS
Electronic Science Department
Kurukshetra University, Haryana
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Hello Vineet
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