Note: This discussion is about an older version of the COMSOL Multiphysics® software. The information provided may be out of date.

Discussion Closed This discussion was created more than 6 months ago and has been closed. To start a new discussion with a link back to this one, click here.

ICP. Capacitive coupling between coil and plasma

Please login with a confirmed email address before reporting spam

Hello!

I would like to simulate Inductively Coupled Plasma source.
One of the well-known features of such plasma sources is that in particular operating conditions power is transferred to the plasma mainly through capacitive coupling.

Does anyone can clarifiy if COMSOL ICP module takes capacitive coupling into account?

If not, is there a way how to handle with this problem?


Thanks!


0 Replies Last Post 3 mag 2012, 03:31 GMT-4
COMSOL Moderator

Hello Andrey Uvarov

Your Discussion has gone 30 days without a reply. If you still need help with COMSOL and have an on-subscription license, please visit our Support Center for help.

If you do not hold an on-subscription license, you may find an answer in another Discussion or in the Knowledge Base.

Note that while COMSOL employees may participate in the discussion forum, COMSOL® software users who are on-subscription should submit their questions via the Support Center for a more comprehensive response from the Technical Support team.