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CCP PLASMA SIMULATION

Posted 5 gen 2006, 23:53 GMT-5 Version 6.0 0 Replies

云鹏 何
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Hi, I have a question: where is the RF cycle set for the CCP plasma simulation in the case. Only N is set in the parameter and is not used. In addition,can low-frequency plasma be simulated?(2Mhz）

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0 Replies Last Post 5 gen 2006, 23:53 GMT-5
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Hello 云鹏 何

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