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Surface growth and moving mesh (ale) ?

Posted 4 feb 2013, 07:36 GMT-5 Mesh Version 4.3a 2 Replies

Lauri Lehtola
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Hi,

I am building a CVD growth model using the heavy species transport, much similar to the silane growth model. My geometry includes a small trench (um scale), where I deposit the material. Is it possible to use the moving mesh system to actually move the edges of the trench according to the growth rate? In this model the setting does not seem to be as straightforward as in electrodeposition models, so if it is possible then how would this be done?

Thanks,
Lauri Lehtola
Aalto University
2 Replies Last Post 5 feb 2013, 06:40 GMT-5
Niklas Rom COMSOL Employee

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Posted: 1 decade ago 4 feb 2013, 10:20 GMT-5
Yes this is possible. Check these examples:
www.comsol.com/showroom/product/electrodeposition-module/
kind regards
Niklas


Hi,

I am building a CVD growth model using the heavy species transport, much similar to the silane growth model. My geometry includes a small trench (um scale), where I deposit the material. Is it possible to use the moving mesh system to actually move the edges of the trench according to the growth rate? In this model the setting does not seem to be as straightforward as in electrodeposition models, so if it is possible then how would this be done?

Thanks,
Lauri Lehtola
Aalto University


Yes this is possible. Check these examples: http://www.comsol.com/showroom/product/electrodeposition-module/ kind regards Niklas [QUOTE] Hi, I am building a CVD growth model using the heavy species transport, much similar to the silane growth model. My geometry includes a small trench (um scale), where I deposit the material. Is it possible to use the moving mesh system to actually move the edges of the trench according to the growth rate? In this model the setting does not seem to be as straightforward as in electrodeposition models, so if it is possible then how would this be done? Thanks, Lauri Lehtola Aalto University [/QUOTE]
Lauri Lehtola
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Posted: 1 decade ago 5 feb 2013, 06:40 GMT-5
Ok, great. What would then be the correct expression for the depositing normal velocity? When I have the trench in the geometry, I get faster deposition rates near the opening than in the bottom, so I would like the mesh to follow this growth.
Ok, great. What would then be the correct expression for the depositing normal velocity? When I have the trench in the geometry, I get faster deposition rates near the opening than in the bottom, so I would like the mesh to follow this growth.

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