Mesh Size

Please login with a confirmed email address before reporting spam

Hello, I hope you're doing well. I have a few questions about meshing and its effect on accurately measuring displacement. I'm working on a structure that is designed to displace by 20 nanometers, and I'm facing some challenges in determining the right meshing parameters. 1. What would be the recommended minimum and maximum element size for the mesh to accurately capture the 20-nanometer displacement? 2. Since my structure is quite complex (it includes springs and several sensing fingers), what meshing strategy or type would you recommend to ensure the most accurate results with minimal error? 3. Finally, does reducing the mesh size always improve accuracy? Or is there an optimal mesh size range beyond which further refinement doesn't provide significant benefits? By the way, I've also attached the dimensions and size of the sensor finger and its gap (d1 and d2). In the attached figure, there is a 20-nanometer displacement along the x-axis in the d1 direction. I would greatly appreciate any advice, tips, or insights on this matter.



Reply

Please read the discussion forum rules before posting.

Please log in to post a reply.

Note that while COMSOL employees may participate in the discussion forum, COMSOL® software users who are on-subscription should submit their questions via the Support Center for a more comprehensive response from the Technical Support team.