Menu

Discussion Forum

New Discussion
Filtra

Discussion Closed This discussion was created more than 6 months ago and has been closed. To start a new discussion with a link back to this one, click here.

Piezoelectric contour mode resonator

Posted 28 feb 2013, 13:31 GMT-5 0 Replies

Tushar Ars
Send Private Message Flag post as spam

Please login with a confirmed email address before reporting spam

Hello,

I am new to the COMSOL. I am trying to simulate a contour mode MEMS resonator. I want to see the length extensional mode of vibration at the fundamental frequency. However, I am getting different results. I think, I am not setting the boundary conditions correctly.

Can anyone help me regarding this.
I have attached a photo of the model. I have two Al electrodes and ZnO film between the electrodes. If I set the boundary conditions correctly, I should see the length extension in y direction at the fundamental frequency.

Thanks

Attachments:

0 Replies Last Post 28 feb 2013, 13:31 GMT-5
COMSOL Moderator

Hello Tushar Ars

Your Discussion has gone 30 days without a reply. If you still need help with COMSOL and have an on-subscription license, please visit our Support Center for help.

If you do not hold an on-subscription license, you may find an answer in another Discussion or in the Knowledge Base.

Note that while COMSOL employees may participate in the discussion forum, COMSOL® software users who are on-subscription should submit their questions via the Support Center for a more comprehensive response from the Technical Support team.

Suggested Content