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Very high displacements shown in resonating MEMS devices

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Hi,

I have been modelling several structures of MEMS resonators and when I do the eigenfrequency analysis, I am getting displacements of the order of 1 m while the size of the structures is of the order of 1 um.

Can anyone tell me why I am getting this problem and how it can be solved?

1 Reply Last Post 25 giu 2013, 03:33 GMT-4
Edgar J. Kaiser Certified Consultant

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Posted: 1 decade ago 25 giu 2013, 03:33 GMT-4
Hi,

the eigenfrequency analysis doesn't show the magnitude of a mode, just the frequency and the shape. The displacement is arbitrary.
If you want to know magnitudes you have to run a frequency domain study around the frequencies of interest and with the appropriate stimulus.

Cheers
Edgar

--
Edgar J. Kaiser
www.emphys.com
Hi, the eigenfrequency analysis doesn't show the magnitude of a mode, just the frequency and the shape. The displacement is arbitrary. If you want to know magnitudes you have to run a frequency domain study around the frequencies of interest and with the appropriate stimulus. Cheers Edgar -- Edgar J. Kaiser http://www.emphys.com

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