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Very high displacements shown in resonating MEMS devices
Posted 25 giu 2013, 01:44 GMT-4 MEMS & Nanotechnology, MEMS & Piezoelectric Devices Version 4.3 1 Reply
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Hi,
I have been modelling several structures of MEMS resonators and when I do the eigenfrequency analysis, I am getting displacements of the order of 1 m while the size of the structures is of the order of 1 um.
Can anyone tell me why I am getting this problem and how it can be solved?
I have been modelling several structures of MEMS resonators and when I do the eigenfrequency analysis, I am getting displacements of the order of 1 m while the size of the structures is of the order of 1 um.
Can anyone tell me why I am getting this problem and how it can be solved?
1 Reply Last Post 25 giu 2013, 03:33 GMT-4
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Posted:
1 decade ago
Hi,
the eigenfrequency analysis doesn't show the magnitude of a mode, just the frequency and the shape. The displacement is arbitrary.
If you want to know magnitudes you have to run a frequency domain study around the frequencies of interest and with the appropriate stimulus.
Cheers
Edgar
--
Edgar J. Kaiser
www.emphys.com
the eigenfrequency analysis doesn't show the magnitude of a mode, just the frequency and the shape. The displacement is arbitrary.
If you want to know magnitudes you have to run a frequency domain study around the frequencies of interest and with the appropriate stimulus.
Cheers
Edgar
--
Edgar J. Kaiser
www.emphys.com