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Deflection of a fixed prestressed MEMS membrane

Posted 4 dic 2013, 05:07 GMT-5 MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Structural Mechanics Version 4.1 0 Replies

Szymon Sowizral
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Hello, I am a new Comsol user and I have a problem with a simulation of a multilayer mems membrane. The simulation results are different form the experimental data. The geometry is a circular 'plate' with four legs fixed at the ends (as shown in an attached file). The membrane is made of 23 layers of PECVD SiO2 and Si3N4.

I am using mems module, solid mechanics interface, linear elastics material model, including geometric nonlinearity (large dimensions: on).

Even when I change the Young's modulus in the material parameters my results are still different from the experimental data (deflection should be much bigger).

I would be very thankful for any hints how to build this model. The comsol file of my model is also attached.

0 Replies Last Post 4 dic 2013, 05:07 GMT-5
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Hello Szymon Sowizral

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