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Simulate deposition onto a continuously moving substrate

Posted 8 ago 2014, 19:29 GMT-4 Computational Fluid Dynamics (CFD), Microfluidics, Modeling Tools & Definitions, Parameters, Variables, & Functions, Results & Visualization Version 5.1 3 Replies

Patrick Morse
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I have successfully modeled a sputtering deposition process onto a static substrate and now I would like to simulate a moving web substrate. The substrate is constantly moving and the data that I want to get off of it is the cross web uniformity (film thickness) after going past the magnetrons. Does anyone know what I can use with the molecular flow module to simulate a continuously moving wall?
3 Replies Last Post 28 set 2015, 18:46 GMT-4
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Aalim Mustafa
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Posted: 9 years ago 28 set 2015, 18:03 GMT-4
Hi Patrick

This is really interesting! did you find something on this?
Hi Patrick This is really interesting! did you find something on this?
Patrick Morse
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Posted: 9 years ago 28 set 2015, 18:19 GMT-4
Hello Aalim,

I did not figure out a elegant way to do this but I did figure out a brute force method. I simulate the static deposition profiles and then go back and create a bunch of line summations in the direction of motion and then plot the results as a function of distance from one side of the substrate. This gives me an answer that I can show in an excel graph but I still would like to figure out how to automate this process.

Best regards,

Patrick
Hello Aalim, I did not figure out a elegant way to do this but I did figure out a brute force method. I simulate the static deposition profiles and then go back and create a bunch of line summations in the direction of motion and then plot the results as a function of distance from one side of the substrate. This gives me an answer that I can show in an excel graph but I still would like to figure out how to automate this process. Best regards, Patrick
Aalim Mustafa
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Posted: 9 years ago 28 set 2015, 18:46 GMT-4
Thanks Patrick for your reply. I really find this interesting, What if we think of mass transfer, like " transport of diluted species " , this may be a good start ! what do you think?

Best regards,
Aalim
Thanks Patrick for your reply. I really find this interesting, What if we think of mass transfer, like " transport of diluted species " , this may be a good start ! what do you think? Best regards, Aalim

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