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BAW Resonator Mesh

Posted 8 set 2014, 02:04 GMT-4 MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Geometry, Mesh, Studies & Solvers, Structural Mechanics Version 3.5a, Version 4.3 0 Replies

Gayathri Pillai
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Hai

I am designing a AlN BAW resonator operating at 3GHz. It is being observed that the frequency response changes widely with the mesh density.

The mesh criteria of the mesh size being between lambda/4 and lambda/6 seems kind of very difficult as the lambda values at 3Ghz is very low and my resonator active area is large.So the computational time is really too long to serve as a good solution.

Please do help me with suggestions as to how to build a reliable mesh for such devices at GHz range.

Regards

Gayathri Pillai
0 Replies Last Post 8 set 2014, 02:04 GMT-4
COMSOL Moderator

Hello Gayathri Pillai

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