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Contact mode capacitive pressure sensor modeling
Posted 28 ott 2014, 00:39 GMT-4 MEMS & Nanotechnology, MEMS & Piezoelectric Devices Version 4.4 3 Replies
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Hello,
I want to model the contact mode capacitive pressure sensor using electromechanics module, but I do not know how to set the contact condition. For the contact mode pressure sensor, there are two insulating layer coated on two electrodes located on diaphragm and substrate respectively. The total thickness of two insulation layers defines the final spacing between terminal and ground when contacted (so that the capacitance can be calculated). I defined contact pair between the two facing surfaces of coating layers. However, if I only define air (in the chamber) as electrical material model, I could not select the electrode boundary (as a internal boundary between electrode and the coating layer) as terminal or ground. If I include the coating layers in the electrical material model, one of the contact pair is "not applicable" in the "electromechanics-->pairs-->structural-->contact". Could any one who has relevant experience tell me where the problem is?
This problem is really frustrating, thanks so much!
I want to model the contact mode capacitive pressure sensor using electromechanics module, but I do not know how to set the contact condition. For the contact mode pressure sensor, there are two insulating layer coated on two electrodes located on diaphragm and substrate respectively. The total thickness of two insulation layers defines the final spacing between terminal and ground when contacted (so that the capacitance can be calculated). I defined contact pair between the two facing surfaces of coating layers. However, if I only define air (in the chamber) as electrical material model, I could not select the electrode boundary (as a internal boundary between electrode and the coating layer) as terminal or ground. If I include the coating layers in the electrical material model, one of the contact pair is "not applicable" in the "electromechanics-->pairs-->structural-->contact". Could any one who has relevant experience tell me where the problem is?
This problem is really frustrating, thanks so much!
3 Replies Last Post 3 nov 2014, 11:49 GMT-5