Coil Optimization of an ICP Reactor
Application ID: 96771
This model shows how shape optimization can be used design the coils of an ICP reactor to obtain plasma uniformity. The reactor in study is a planar ICP with the coils distributed along the radial direction. The Optimization study step is used to find the best coil placement so that the gradient of the electron density in the reactor center is minimized. A target electron density in the reactor center is also imposed by varying the coil power.
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