%--------------------------------- % Ar/O2 plasma chemistry %--------------------------------- %--------------------------------- % Species %--------------------------------- SPECIES PRESETSPECIESDATA O2 = O2 O = O O_1m = O O2a1Dg = O2 O1D = O O2_1p = O2 O_1p = O Ar = Ar Ars = Ar Ar_1p = Ar END %--------------------------------- % Electron impact reactions %--------------------------------- ELECTRONIMPACTREACTIONS CROSSSECTIONDATA O2_phelps_xsecs.txt O_morgan_xsecs.txt Ar_xsecs.txt END ELECTRONIMPACTREACTIONS RATECONSTANT e+O-=>O+e+e ! Ionization 12.0 5.47e-14[m^3/s]*N_A_const*exp(-2.98[V]/TE)*(TE/1[V])^0.324 END %--------------------------------- % Heavy species reactions %--------------------------------- HEAVYSPECIESREACTIONS RATECONSTANT O++O2=>O+O2+ ! 2e-17[m^3/s]*N_A_const*(300[K]/TGAS)^0.5 O-+O+=>O+O ! 4e-14[m^3/s]*N_A_const*(300[K]/TGAS)^0.43 O-+O2+=>O+O+O ! 2.6e-14[m^3/s]*N_A_const*(300[K]/TGAS)^0.44 O-+O2+=>O+O2 ! 2.6e-14[m^3/s]*N_A_const*(300[K]/TGAS)^0.44 O-+O=>O2+e ! 3.0e-16[m^3/s]*N_A_const O-+Ar+=>O+Ar ! 4e-14[m^3/s]*N_A_const*(300[K]/TGAS)^0.43 END %--------------------------------- % Surface reactions %--------------------------------- SURFACEREACTIONS Ar+=>Ar ! 1 0.07 5.8 Ars=>Ar ! 1 0.07 5.8 O=>0.5O2 ! 0.2 0.0 0.0 O2+=>O2 ! 1 0.05 4.0 O-=>O ! 1 0.0 0.0 O2a1Dg=>O2 ! 1 0.0 0.0 O1D=>0.5O2 ! 0.2 0.0 0.0 O+=>O ! 1 0.05 4.0 END