LXcat, http://www.lxcat.laplace.univ-tlse.fr Generated on 18 Nov 2010. All rights reserved. EACH COLLISION PROCESS IS DEFINED BY A BLOCK CONSISTING OF 1st line Keyword in capitals indicating the type of the collision. Possible collision types are 'elastic', 'momentum', 'excitation', 'ionization', or 'attachment' (capital letters required, key words are case sensitive), where momentum is the sum of the elastic and inelastic cross sections (useful for solving the Boltzmann equation in the 2-term approximation). 2nd line Name of the target particle species. This name is a character string, freely chosen by the user, e.g. 'Ar'. Optionally for excitation processes, the name of the corresponding excited state can be specified on the same line, separated from the first name either by arrow '->' or by double-head arrow '', e.g. 'Ar -> Ar*' and 'Ar Ar*', respectively. In the later case BOLSIG+ will automatically define the inverse superelastic process, constructing the superelastic cross-section by detailed balancing, and considering the indicated excited state as the target. In this case, the ratio of statistical weights must be input in the 3rd line (see below). Alternatively, superelastic collisions could be defined explicitly as excitation collisions with a negative electron energy loss with user input cross sections and species name, 'Ar*', for example. 3rd line For elastic and momentum transfer collisions, the ratio of the electron mass to the target particle mass. For excitation or ionization collisions, the electron energy loss (nominally the threshold energy) in eV. For attachment, the 3rd line is missing. In case of an excitation process where an excited state has been indicated on the 2nd line using double-head arrow '', the 3rd line must specify also ratio of the statistical weights of the final state to the initial state as the second parameter in 3rd line; this is needed by BOLSIG+ to calculate the de-excitation cross-section. from 4th line (optionally) User comments and reference information, maximum 100 lines. ZDPlasKin reaction label could be indicated here, for example. The only constraint on format is that these comment lines must not start with a number. Finally Table of the cross section as a function of energy. The table starts and ends by a line of dashes '------' (at least 5), and has otherwise two numbers per line: the energy in eV and the cross section in m2. +-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+ +-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+ +-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+ Hayashi (Compilation Of Electron Cross Sections Used By M. Hayashi) DESCRIPTION: These data (except for Ar) were digitized from the curves in Hayashi's article in the book "Swarm Studies and Inelastic Electron-Molecule collisions", eds. LC Pitchford, BV McKoy, A Chutjian and S Trajmar, Springer-Verlag, New York, 1987. Hayashi's collection of references for each gas is given below. CROSS SECTIONS Species/processes: Ar (27), C2H2 (8), C2H4 (7), C2H6 (7), CCl2F2 (6), CCl4 (8), CF4 (7), CH4 (6), CO2 (10), H2O (8), HCl (6), N2O (9), NH3 (8), NO (10), Si2H6 (7), SiH4 (7), SO2 (6) Number of downloads from 14 November 2010: 36 Last update: 28 September 2010, 11:23 +-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+ COMMENT SiH4 References :- C. A. DeJoseph, et al., Proc. Int. Conf. on Lasers, 738 ('82). A. Garscadden, et al., Appl. Phys.Lett. 43, 1012 (1983). M. Hayashi, Dry Process Symposium, Tokyo, V-7, 127 (1984). J. Perrin, et al., Chem. Phys. 73, 383 (1982). H. Chatham, et al., J. Chem. Phys. 81, 1770 (1984). T. L. Cottrell, et al., Trans. Faraday Soc. 61, 1585 (1965). W. L. Pollock, Trans. Faraday Soc. 64, 2919 (1968). M. Shimozuma, et al., Tech. Papers of Electrical Discharge, IEE Japan, ED-83-86 (1983) ( in Japanese). O. Sueoka, Private Communication (1984) Exp. values of QT. I. C. Walker, Private Comm. (1984) Exp. values of W and DT/mu . A. Jain, Private Communication (1985) Fig. 14 and others. J. Perin and J. F. M. Aarts, Chem. Phys. 80, 351 (1983). W. B. Steward, et al., Phys. Rev. 47, 828 (1935). C. H. Tindal, et al., Phys. Rev. 62, 151 (1942). T. F. Deutsch, J. Chem. Phys. 70,1187 (1979). ----------------------------------------------------------------------------------------------------------------------- ELASTIC SiH4 1.700e-5 / mass ratio UPDATED: 2010-01-21 13:31:31 ------------------------------------------------------------ 9.4150e-2 6.8779e-20 1.0000e-1 6.3805e-20 1.0694e-1 5.7794e-20 1.1949e-1 4.9512e-20 1.3080e-1 4.2950e-20 1.4200e-1 3.6795e-20 1.5997e-1 2.9813e-20 1.7487e-1 2.4460e-20 1.9406e-1 1.9461e-20 2.0611e-1 1.6863e-20 2.2042e-1 1.4010e-20 2.4095e-1 1.1287e-20 2.5002e-1 9.7244e-21 2.6158e-1 8.9192e-21 2.7556e-1 7.8792e-21 2.8594e-1 7.0964e-21 2.9672e-1 6.4279e-21 3.1044e-1 5.7499e-21 3.2213e-1 5.2023e-21 3.3473e-1 4.9822e-21 3.4973e-1 5.0795e-21 3.6043e-1 5.4382e-21 3.7400e-1 6.0381e-21 3.9130e-1 7.0482e-21 4.0604e-1 8.0239e-21 4.3423e-1 9.7910e-21 4.7143e-1 1.2002e-20 5.1532e-1 1.4628e-20 5.5110e-1 1.6863e-20 5.9831e-1 1.9932e-20 6.6943e-1 2.5223e-20 7.6560e-1 3.2505e-20 8.6843e-1 4.0900e-20 1.0083e+0 5.3982e-20 1.1531e+0 6.7924e-20 1.3480e+0 8.8033e-20 1.5312e+0 1.1077e-19 1.8047e+0 1.4178e-19 2.0471e+0 1.7300e-19 2.4866e+0 2.2143e-19 2.7182e+0 2.4005e-19 3.0622e+0 2.5847e-19 3.5553e+0 2.6502e-19 4.2192e+0 2.6836e-19 4.9730e+0 2.6173e-19 5.6875e+0 2.4613e-19 6.5046e+0 2.2704e-19 8.3806e+0 1.9209e-19 1.1547e+1 1.5093e-19 1.4655e+1 1.2299e-19 1.9012e+1 9.7189e-20 2.6593e+1 7.1817e-20 3.0206e+1 6.3084e-20 3.8074e+1 5.1698e-20 4.3843e+1 4.5154e-20 5.8216e+1 3.3139e-20 6.9658e+1 2.7344e-20 8.9748e+1 2.1074e-20 1.1128e+2 1.6767e-20 1.3116e+2 1.4186e-20 1.5802e+2 1.1705e-20 1.9327e+2 9.4841e-21 2.1447e+2 8.4357e-21 2.4361e+2 7.3595e-21 2.7257e+2 6.4645e-21 2.9149e+2 5.9630e-21 ------------------------------------------------------------ EXCITATION SiH4 -> SiH4(0.115eV) 1.150e-1 / threshold energy UPDATED: 2010-06-25 14:00:15 ------------------------------------------------------------ 1.1500e-1 0.0000e+0 1.1515e-1 8.3203e-21 1.1868e-1 4.0491e-20 1.2502e-1 4.2038e-20 1.3779e-1 4.1281e-20 1.4615e-1 4.0262e-20 1.5395e-1 3.9268e-20 1.6714e-1 3.7142e-20 1.8296e-1 3.3839e-20 2.1068e-1 3.0102e-20 2.4095e-1 2.7613e-20 2.7368e-1 2.5940e-20 3.2479e-1 2.4397e-20 3.8229e-1 2.2945e-20 4.7858e-1 2.1434e-20 5.5947e-1 2.0388e-20 6.7959e-1 1.9417e-20 8.8161e-1 1.8241e-20 1.1884e+0 1.7811e-20 1.6374e+0 1.7690e-20 2.1742e+0 1.7912e-20 2.8206e+0 1.8014e-20 3.2973e+0 1.8702e-20 3.7452e+0 1.9773e-20 3.9725e+0 2.1288e-20 4.2192e+0 2.3076e-20 4.6121e+0 2.6266e-20 5.0072e+0 3.0308e-20 5.4810e+0 3.5573e-20 5.9018e+0 3.9537e-20 6.1241e+0 4.2278e-20 6.3549e+0 4.3644e-20 6.6487e+0 4.4142e-20 7.1592e+0 4.1753e-20 7.5520e+0 3.8082e-20 8.5078e+0 3.3839e-20 9.1610e+0 3.1430e-20 1.0406e+1 2.8473e-20 1.2164e+1 2.5793e-20 1.3704e+1 2.3795e-20 1.5565e+1 2.1703e-20 1.7132e+1 2.0273e-20 2.0331e+1 1.7690e-20 2.3252e+1 1.5541e-20 2.6812e+1 1.3392e-20 3.0875e+1 1.1475e-20 3.5311e+1 1.0013e-20 3.8335e+1 9.0706e-21 4.2541e+1 7.9688e-21 4.6886e+1 7.0009e-21 5.2460e+1 6.1505e-21 5.6488e+1 5.3667e-21 6.0908e+1 4.7149e-21 6.5136e+1 4.1895e-21 6.8055e+1 3.8212e-21 6.9658e+1 3.4814e-21 ------------------------------------------------------------ EXCITATION SiH4 -> SiH4(0.27eV) 2.700e-1 / threshold energy UPDATED: 2010-06-25 14:00:28 ------------------------------------------------------------ 2.7000e-1 0.0000e+0 2.7167e-1 4.5414e-21 2.7392e-1 7.2775e-21 2.7770e-1 1.8330e-20 2.7999e-1 2.0356e-20 2.8620e-1 2.2348e-20 2.9699e-1 2.4231e-20 3.0609e-1 2.5447e-20 3.2025e-1 2.7092e-20 3.4251e-1 2.8098e-20 3.7443e-1 2.8452e-20 4.3478e-1 2.7403e-20 4.8252e-1 2.6422e-20 5.3993e-1 2.5303e-20 5.9026e-1 2.4066e-20 6.8071e-1 2.2759e-20 7.4415e-1 2.1795e-20 8.2587e-1 2.0872e-20 9.3818e-1 1.9852e-20 1.0879e+0 1.9383e-20 1.2090e+0 1.9141e-20 1.3829e+0 1.9011e-20 1.5453e+0 1.8903e-20 1.7554e+0 1.8903e-20 2.0078e+0 1.9141e-20 2.2283e+0 1.9141e-20 2.5106e+0 1.9627e-20 2.8520e+0 1.9852e-20 3.2621e+0 2.0612e-20 3.8140e+0 2.2476e-20 4.3924e+0 2.6093e-20 4.7364e+0 2.8098e-20 5.1779e+0 3.1994e-20 5.4547e+0 3.5569e-20 5.7939e+0 3.9052e-20 6.1965e+0 4.2826e-20 6.4302e+0 4.4164e-20 6.8770e+0 4.3366e-20 7.2447e+0 4.1012e-20 7.8014e+0 3.6680e-20 8.4703e+0 3.2620e-20 9.0588e+0 2.9341e-20 1.0591e+1 2.3337e-20 1.1173e+1 2.1135e-20 1.2114e+1 1.8903e-20 1.2867e+1 1.6696e-20 1.3762e+1 1.5035e-20 1.4617e+1 1.3447e-20 1.5505e+1 1.1877e-20 1.6090e+1 1.0818e-20 1.6582e+1 9.6751e-21 1.7350e+1 8.8224e-21 1.8403e+1 7.7923e-21 1.9547e+1 6.9218e-21 2.0593e+1 6.3478e-21 2.1694e+1 5.6773e-21 2.3043e+1 5.1769e-21 2.4644e+1 4.6885e-21 2.5962e+1 4.3243e-21 2.7350e+1 4.0157e-21 2.8813e+1 3.7249e-21 3.0105e+1 3.4355e-21 ------------------------------------------------------------ EXCITATION SiH4 -> SiH4*(8.01eV) 8.010e+0 / threshold energy UPDATED: 2010-06-25 14:00:52 ------------------------------------------------------------ 8.0100e+0 0.0000e+0 8.0763e+0 4.5414e-21 8.1877e+0 4.9229e-21 8.3120e+0 5.9580e-21 8.4382e+0 6.4584e-21 8.5078e+0 7.0889e-21 8.6963e+0 7.9688e-21 8.7561e+0 8.7468e-21 8.8890e+0 1.0013e-20 9.0240e+0 1.0990e-20 9.2366e+0 1.2285e-20 9.3640e+0 1.3561e-20 9.5846e+0 1.4600e-20 9.6504e+0 1.5736e-20 9.7969e+0 1.7039e-20 1.0097e+1 1.8365e-20 1.0320e+1 1.9885e-20 1.0636e+1 2.1434e-20 1.0798e+1 2.3076e-20 1.1037e+1 2.5157e-20 1.1281e+1 2.6931e-20 1.1453e+1 2.9193e-20 1.1803e+1 3.0864e-20 1.2065e+1 3.2226e-20 1.2248e+1 3.3839e-20 1.2349e+1 3.4932e-20 1.2622e+1 3.8082e-20 1.3009e+1 4.1281e-20 1.3610e+1 4.3892e-20 1.3704e+1 4.6669e-20 1.4123e+1 4.8783e-20 1.4555e+1 5.1225e-20 1.4878e+1 5.4157e-20 1.5438e+1 5.7257e-20 1.5672e+1 6.0880e-20 1.6263e+1 6.3637e-20 1.6646e+1 6.6823e-20 1.6876e+1 6.9771e-20 1.7392e+1 7.1536e-20 1.7777e+1 7.3347e-20 1.8321e+1 7.6062e-20 1.9168e+1 7.7987e-20 2.0055e+1 7.8967e-20 2.1271e+1 7.8967e-20 2.3252e+1 7.8967e-20 2.5452e+1 7.8520e-20 2.6812e+1 7.6062e-20 2.8014e+1 7.3347e-20 2.9551e+1 7.0648e-20 3.1344e+1 6.7663e-20 3.2303e+1 6.3637e-20 3.3796e+1 6.0535e-20 3.4783e+1 5.6546e-20 3.6391e+1 5.4157e-20 3.8335e+1 5.1225e-20 3.9185e+1 4.6988e-20 3.9780e+1 4.3644e-20 4.1619e+1 3.9989e-20 4.3843e+1 3.5372e-20 4.4814e+1 3.1825e-20 4.5870e+1 2.9560e-20 4.7209e+1 2.7270e-20 4.8321e+1 2.4397e-20 4.9799e+1 2.1827e-20 5.0903e+1 2.0021e-20 5.2821e+1 1.8014e-20 5.3622e+1 1.5934e-20 5.4437e+1 1.4079e-20 5.5643e+1 1.2826e-20 5.6954e+1 1.1619e-20 5.9100e+1 1.0586e-20 5.9997e+1 9.7104e-21 6.1748e+1 8.6382e-21 6.3637e+1 7.5374e-21 6.4162e+1 6.7894e-21 6.6579e+1 6.1505e-21 6.7590e+1 5.5339e-21 6.9658e+1 4.9848e-21 7.0619e+1 4.4596e-21 7.2779e+1 4.0861e-21 7.3884e+1 3.6143e-21 ------------------------------------------------------------ EXCITATION SiH4 -> SiH4*(8.92eV) 8.920e+0 / threshold energy UPDATED: 2010-06-25 14:01:37 ------------------------------------------------------------ 8.9200e+0 0.0000e+0 8.9212e+0 3.6129e-21 8.9824e+0 5.3730e-21 9.1186e+0 5.9334e-21 9.2569e+0 6.4339e-21 9.3332e+0 7.1538e-21 9.4618e+0 7.7042e-21 9.5398e+0 8.1470e-21 9.7510e+0 8.6153e-21 9.9805e+0 9.2254e-21 1.0118e+1 9.6891e-21 1.0356e+1 1.0447e-20 1.0585e+1 1.1110e-20 1.0746e+1 1.1816e-20 1.0984e+1 1.2199e-20 1.1242e+1 1.2812e-20 1.1491e+1 1.3642e-20 1.1745e+1 1.4426e-20 1.2372e+1 1.5065e-20 1.2474e+1 1.5931e-20 1.2944e+1 1.6731e-20 1.3431e+1 1.7693e-20 1.3747e+1 1.8371e-20 1.4148e+1 1.9427e-20 1.4801e+1 2.0404e-20 1.5485e+1 2.1454e-20 1.6068e+1 2.2817e-20 1.6810e+1 2.4128e-20 1.7443e+1 2.5515e-20 1.8500e+1 2.6828e-20 1.9487e+1 2.8016e-20 2.0083e+1 3.0000e-20 2.1011e+1 3.1508e-20 2.1951e+1 3.3129e-20 2.2808e+1 3.4165e-20 2.3473e+1 3.5678e-20 2.4558e+1 3.7259e-20 2.5692e+1 3.8688e-20 2.6842e+1 4.1145e-20 2.8082e+1 4.2723e-20 2.9139e+1 4.4870e-20 3.0235e+1 4.6858e-20 3.1416e+1 4.9269e-20 3.2599e+1 5.1804e-20 3.3320e+1 5.3425e-20 3.4575e+1 5.5410e-20 3.6470e+1 5.7864e-20 3.8102e+1 6.0084e-20 3.8680e+1 6.1962e-20 3.9862e+1 6.3175e-20 4.2278e+1 6.5974e-20 4.3273e+1 6.8426e-20 4.5896e+1 7.0164e-20 4.8345e+1 7.2855e-20 5.0578e+1 7.5563e-20 5.4086e+1 7.6517e-20 5.8234e+1 7.7483e-20 6.0924e+1 7.7042e-20 6.4705e+1 7.4197e-20 6.7601e+1 7.1947e-20 7.0723e+1 6.9765e-20 7.3990e+1 6.7650e-20 7.6775e+1 6.4707e-20 8.0873e+1 6.1962e-20 8.4609e+1 5.9742e-20 8.9736e+1 5.7208e-20 9.3881e+1 5.4719e-20 9.8892e+1 5.2759e-20 1.0489e+2 5.0176e-20 1.1216e+2 4.7775e-20 1.3217e+2 4.2432e-20 1.4134e+2 4.0401e-20 1.5449e+2 3.8205e-20 1.6520e+2 3.6129e-20 1.7666e+2 3.4165e-20 1.8891e+2 3.2308e-20 2.0201e+2 3.0379e-20 2.1930e+2 2.9057e-20 2.3100e+2 2.7667e-20 2.4167e+2 2.6645e-20 2.5667e+2 2.5690e-20 2.7037e+2 2.4600e-20 2.8247e+2 2.3827e-20 2.9110e+2 2.3263e-20 ------------------------------------------------------------ IONIZATION SiH4 -> SiH4^+ 1.290e+1 / threshold energy COMMENT: total ionization UPDATED: 2010-05-07 13:54:11 ------------------------------------------------------------ 1.2900e+1 0.0000e+0 1.3009e+1 5.4060e-21 1.3098e+1 6.6740e-21 1.3297e+1 7.4114e-21 1.3407e+1 8.2866e-21 1.3499e+1 9.0979e-21 1.3704e+1 9.9773e-21 1.3912e+1 1.0954e-20 1.4123e+1 1.2095e-20 1.4220e+1 1.3114e-20 1.4555e+1 1.3867e-20 1.4878e+1 1.4932e-20 1.5103e+1 1.6601e-20 1.5333e+1 1.7775e-20 1.5565e+1 1.9141e-20 1.5780e+1 2.0754e-20 1.6152e+1 2.2348e-20 1.6510e+1 2.3631e-20 1.7015e+1 2.5130e-20 1.7273e+1 2.6908e-20 1.7777e+1 2.8452e-20 1.8047e+1 2.9542e-20 1.8599e+1 3.0849e-20 1.9168e+1 3.2620e-20 1.9593e+1 3.4063e-20 2.0193e+1 3.5569e-20 2.0953e+1 3.7398e-20 2.1594e+1 3.9275e-20 2.2408e+1 4.0779e-20 2.3252e+1 4.2293e-20 2.4528e+1 4.4164e-20 2.5627e+1 4.5595e-20 2.6997e+1 4.7612e-20 2.8245e+1 4.9718e-20 2.9551e+1 5.1271e-20 3.1130e+1 5.2214e-20 3.3291e+1 5.3539e-20 3.5070e+1 5.4897e-20 3.6391e+1 5.6612e-20 3.8652e+1 5.7653e-20 4.1619e+1 5.9116e-20 4.6185e+1 6.0272e-20 5.5643e+1 6.1731e-20 6.3202e+1 6.1731e-20 6.8616e+1 6.2154e-20 7.6144e+1 6.1731e-20 8.2667e+1 6.0962e-20 9.0986e+1 6.0962e-20 9.9595e+1 6.0272e-20 1.0492e+2 5.9116e-20 1.1563e+2 5.8048e-20 1.2537e+2 5.6612e-20 1.3224e+2 5.5907e-20 1.4143e+2 5.4523e-20 1.5333e+2 5.3539e-20 1.6784e+2 5.1917e-20 1.8221e+2 4.9379e-20 1.9918e+2 4.7612e-20 2.1447e+2 4.5855e-20 2.3285e+2 4.3913e-20 2.4901e+2 4.2826e-20 2.6052e+2 4.1529e-20 2.7633e+2 4.0271e-20 2.8911e+2 3.9544e-20 ------------------------------------------------------------ ATTACHMENT SiH4 -> SiH4^- COMMENT: total attachment UPDATED: 2010-05-07 13:58:30 ------------------------------------------------------------ 7.5700e+0 0.0000e+0 7.6222e+0 4.9546e-21 7.6850e+0 5.7443e-21 7.7378e+0 6.5026e-21 7.8016e+0 6.9146e-21 7.8551e+0 8.4860e-21 7.9742e+0 1.2694e-20 8.0400e+0 1.3840e-20 8.0952e+0 1.6047e-20 8.1508e+0 1.6775e-20 8.3426e+0 1.7298e-20 8.5976e+0 1.7298e-20 8.7160e+0 1.6870e-20 8.7879e+0 1.5757e-20 8.8482e+0 1.2927e-20 8.9212e+0 9.9060e-21 9.0564e+0 9.0855e-21 9.1186e+0 6.1152e-21 9.1938e+0 5.5326e-21 9.3205e+0 5.0113e-21 9.3973e+0 4.1916e-21 9.4618e+0 3.8400e-21 9.5398e+0 3.3310e-21 ------------------------------------------------------------ +-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+ +-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+ +-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+