Zernike Polynomial Fitting of a Deformed Surface

Application ID: 100611


This tutorial shows how the displacement field of a deformed surface can be fit to a Zernike polynomial basis. The method of linear least-squares fitting is made significantly easier when fitting to an orthonormal basis, such as the Zernike polynomials on a circle.

The displacement field is compared to the superposition of the piston, defocus, and spherical aberration terms with coefficients obtained via linear least-squares fitting. The remaining terms are negligible due to the symmetry of the displacement field.

This model example illustrates applications of this type that would nominally be built using the following products: