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Design, Simulation and Study of MEMS Based Micro-Needles and Micro-Pump for Biomedical Applications
Published in 2011
In this paper, we have addressed the issues related to the design and simulation of MEMS based silicon micro-needles for insertion of fluid into the dermis layer and into the subcutaneous fat layer. In addition, a poly-silicon micro-pump based on the principle of electrostatic actuation has been designed and simulated which can be integrated with the proposed micro-needles to control the fluid flow.
Upon insertion in the skin, the micro-needle faces two types of forces – buckling and bending. Stress distribution of the micro-needles are investigated for both of these forces by varying the geometric parameters such as channel thickness, needle tip angle etc.
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