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The Origin of Mass-change Sensitivity within Multi-layered, Non-uniform, Piezoelectrically-actuated Millimeter-sized Cantilever (PEMC) Biosensors: Vibrational Analysis through Experiment and Finite Element Modeling (FEM)

B.N. Johnson[1], and R. Mutharasan[1]

[1]Department of Chemical and Biological Engineering, Drexel University, Philadelphia, Pennsylvania, USA
Published in 2009

A 3D finite element model (FEM) of the PEMC sensor was developed to characterize the modes of vibration that have demonstrated high sensitivity to mass-change in experimentally fabricated sensors. The fundamental bending mode of vibration and the 1st bending harmonic are predicted at 10.0 kHz and 86.8 kHz, respectively, within approximately 5 % of the experimentally measured resonances. The Structural Mechanics-Piezoelectric Module in COMSOL Multiphysics was used to carry out 3D eigenfrequency analysis and 3D frequency response analysis on the PEMC sensor using default Lagrange-Quadratic type elements.

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