Discussion Closed This discussion was created more than 6 months ago and has been closed. To start a new discussion with a link back to this one, click here.
How to get stress tensor in silicon nitride waveguide?
Posted 17 nov 2022, 11:35 GMT-5 MEMS & Piezoelectric Devices, Structural Mechanics, Physics Interfaces Version 6.0 0 Replies
Please login with a confirmed email address before reporting spam
Hello, I am simulating a PZT actuator on a Silicon Nitride waveguide in 2D to observe stress distribution in the whole structure. The design is based on a publication. I am getting stress only in the PZT layer by applying voltage on the Pt electrodes (See the attachment1). However, I need to get the stress in the waveguide structure (Si3N4 waveguide and surrounding SiO2 cladding) like the attachment 2. I am using Solid Mechanics and Electrostatics physics to observe the stress distribution. Do I need to couple other physics to obtain the stress distribution in the waveguide structure? I am using fixed constrain to compact the stress inside the structure but I am not sure whether it is a correct boundary condition or not. It will be a great help if I get any valuable suggestion from here.
Attachments:
Hello Rifat Nazneen
Your Discussion has gone 30 days without a reply. If you still need help with COMSOL and have an on-subscription license, please visit our Support Center for help.
If you do not hold an on-subscription license, you may find an answer in another Discussion or in the Knowledge Base.