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Piezoelectric beam - Unsymmetrical displacement
Posted 7 ago 2014, 23:57 GMT-4 MEMS & Nanotechnology, Piezoelectric Devices, MEMS & Piezoelectric Devices 0 Replies
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I work on the piezoelectric energy harvester. I use doubly clamped structure with proof mass at the center. Though the beam structure is symmetrical, when Eigen frequency analysis is performed the output is unsymmetrical. Also I dont see any meshing convergence, when I increase the mesh size the results are very different with each other. Kindly help out which is overlooked. Thank you.
PS: I use Aluminum Nitride as Piezoelectric layer (c-axis oriented and spontaneously polarized). I use d31 mode believing the default axis is z-axis oriented.
Hello Rajasekaran Ganeshkumar
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